Tokyo Electron Develops an Extreme Laser Lift Off …
Tokyo Electron (TEL; Head Office: Minato-ku, Tokyo; President: Toshiki Kawai) announced that a development team at Tokyo Electron Kyushu, - the development and manufacturing site for wafer bonder/debonder systems- has developed an Extreme Laser Lift Off (XLO) technology that contributes to innovations in 3D integration of advanced semiconductor …
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